Inventor
ZARKAR KAVEH
US5 patents
⚠️ This page may combine multiple inventors who share the name “ZARKAR KAVEH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MKS INSTR INC
4 patentsUS7474968B2Jan 6, 2009
Critical flow based mass flow verifier
MKS INSTR INC59 citations97
US7891228B2Feb 22, 2011
Dual-mode mass flow verification and mass flow delivery system and method
MKS INSTR INC56 citations96
US7757554B2Jul 20, 2010
High accuracy mass flow verifier with multiple inlets
MKS INSTR INC20 citations91
US6955072B2Oct 18, 2005
System and method for in-situ flow verification and calibration
MKS INSTR INC33 citations84