Inventor
SHIELY JAMES P
US14 patents
⚠️ This page may combine multiple inventors who share the name “SHIELY JAMES P”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SYNOPSYS INC
11 patentsUS7251807B2Jul 31, 2007
Method and apparatus for identifying a manufacturing problem area in a layout using a process-sensitivity model
SYNOPSYS INC14 citations92
US7243332B2Jul 10, 2007
Method and apparatus for identifying a manufacturing problem area in a layout using a gradient-magnitude of a process-sensitivity model
SYNOPSYS INC10 citations83
US8972229B2Mar 3, 2015
Fast 3D mask model based on implicit countors
SYNOPSYS INC9 citations80
US7784018B2Aug 24, 2010
Method and apparatus for identifying a manufacturing problem area in a layout using a gradient-magnitude of a process-sensitivity model
SYNOPSYS INC4 citations73
US9646127B2May 9, 2017
3D resist profile aware etch-bias model
SYNOPSYS INC2 citations71
US9484186B2Nov 1, 2016
Modeling and correcting short-range and long-range effects in E-beam lithography
SYNOPSYS INC3 citations66
US7933471B2Apr 26, 2011
Method and system for correlating physical model representation to pattern layout
SYNOPSYS INC3 citations62
US7494751B2Feb 24, 2009
Method and apparatus for improving depth of focus during optical lithography
SYNOPSYS INC4 citations62
US7320119B2Jan 15, 2008
Method and apparatus for identifying a problem edge in a mask layout using an edge-detecting process-sensitivity model
SYNOPSYS INC3 citations62
US11200362B2Dec 14, 2021
3D resist profile aware resolution enhancement techniques
SYNOPSYS INC0 citations61
US7308673B2Dec 11, 2007
Method and apparatus for correcting 3D mask effects
SYNOPSYS INC1 citations51
SONG HUA
3 patentsUS8423917B2Apr 16, 2013
Modeling thin-film stack topography effect on a photolithography process
SONG HUA6 citations70
US8132128B2Mar 6, 2012
Method and system for performing lithography verification for a double-patterning process
SONG HUA2 citations54
US8601404B2Dec 3, 2013
Modeling EUV lithography shadowing effect
SONG HUA0 citations43