Inventor

BOROWICZ MARK

US4 patents

⚠️ This page may combine multiple inventors who share the name “BOROWICZ MARK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KLA TENCOR TECH CORP

3 patents

US7304302B1Dec 4, 2007

Systems configured to reduce distortion of a resist during a metrology process and systems and methods for reducing alteration of a specimen during analysis

KLA TENCOR TECH CORP55 citations92

US7488938B1Feb 10, 2009

Charge-control method and apparatus for electron beam imaging

KLA TENCOR TECH CORP14 citations82

US7365321B2Apr 29, 2008

Methods and systems for measuring a characteristic of a substrate or preparing a substrate for analysis

KLA TENCOR TECH CORP4 citations60

NASSER-GHODSI MEHRAN

1 patent

US8765496B2Jul 1, 2014

Methods and systems for measuring a characteristic of a substrate or preparing a substrate for analysis

NASSER-GHODSI MEHRAN4 citations69