P

Inventor

ZHANG ZISHU

US14 patents
⚠️ This page may combine multiple inventors who share the name “ZHANG ZISHU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ZHANG ZISHU

3 patents
US8288083B2Oct 16, 2012

Methods of forming patterned masks

ZHANG ZISHU8 citations81
US8476002B2Jul 2, 2013

Methods of forming patterned masks

ZHANG ZISHU0 citations49
US8409457B2Apr 2, 2013

Methods of forming a photoresist-comprising pattern on a substrate

ZHANG ZISHU0 citations39

HE YUAN

3 patents
US8440371B2May 14, 2013

Imaging devices, methods of forming same, and methods of forming semiconductor device structures

HE YUAN3 citations60
US8736814B2May 27, 2014

Lithography wave-front control system and method

HE YUAN0 citations51
US9235134B2Jan 12, 2016

Lens heating compensation in photolithography

HE YUAN0 citations50

MICRON TECHNOLOGY INC

2 patents
US8815497B2Aug 26, 2014

Semiconductor constructions and methods of forming patterns

MICRON TECHNOLOGY INC5 citations71
US9140977B2Sep 22, 2015

Imaging devices, methods of forming same, and methods of forming semiconductor device structures

MICRON TECHNOLOGY INC0 citations52

LIGHT SCOTT L

2 patents
US8845908B2Sep 30, 2014

Reticles, and methods of mitigating asymmetric lens heating in photolithography

LIGHT SCOTT L0 citations50
US8728721B2May 20, 2014

Methods of processing substrates

LIGHT SCOTT L0 citations39

MILLWARD DAN

1 patent
US8486611B2Jul 16, 2013

Semiconductor constructions and methods of forming patterns

MILLWARD DAN7 citations82

MILLWARD DAN B

1 patent
US8507191B2Aug 13, 2013

Methods of forming a patterned, silicon-enriched developable antireflective material and semiconductor device structures including the same

MILLWARD DAN B2 citations62

LIGHT SCOTT

1 patent
US8883372B2Nov 11, 2014

Reticle with composite polarizer and method of simultaneous optimization of imaging of a set of different patterns

LIGHT SCOTT2 citations59

ZHOU JIANMING

1 patent
US8625078B2Jan 7, 2014

Illumination design for lens heating mitigation

ZHOU JIANMING1 citations51