Inventor
MATSUDO TATSUO
JP56 patents
⚠️ This page may combine multiple inventors who share the name “MATSUDO TATSUO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
31 patentsUS8703002B2Apr 22, 2014
Plasma processing apparatus, plasma processing method and storage medium
TOKYO ELECTRON LTD343 citations98
US7582182B2Sep 1, 2009
Method and apparatus for measuring electron density of plasma and plasma processing apparatus
TOKYO ELECTRON LTD14 citations92
US7339656B2Mar 4, 2008
Method and apparatus for measuring electron density of plasma and plasma processing apparatus
TOKYO ELECTRON LTD20 citations92
US11315765B2Apr 26, 2022
Plasma processing apparatus and plasma processing method
TOKYO ELECTRON LTD8 citations86
US10325758B2Jun 18, 2019
Plasma processing apparatus
TOKYO ELECTRON LTD13 citations84
US10184786B2Jan 22, 2019
Wear amount measuring apparatus and method, temperature measuring apparatus and method and substrate processing system
TOKYO ELECTRON LTD6 citations84
US7713431B2May 11, 2010
Plasma processing method
TOKYO ELECTRON LTD16 citations82
US9163931B2Oct 20, 2015
Apparatus and method for measuring thickness and temperature and substrate processing system
TOKYO ELECTRON LTD6 citations73
US7532322B2May 12, 2009
Method and apparatus for measuring electron density of plasma and plasma processing apparatus
TOKYO ELECTRON LTD6 citations72
US9500537B2Nov 22, 2016
Temperature measurement apparatus and method
TOKYO ELECTRON LTD2 citations63
US9412562B2Aug 9, 2016
Capacitive coupling plasma processing apparatus
TOKYO ELECTRON LTD2 citations63
US9028139B2May 12, 2015
Method of measuring temperature of component in processing chamber of substrate processing apparatus
TOKYO ELECTRON LTD3 citations63
US7952717B2May 31, 2011
Temperature measuring apparatus and temperature measuring method
TOKYO ELECTRON LTD6 citations63
US12482635B2Nov 25, 2025
Plasma processing device, and plasma processing method
TOKYO ELECTRON LTD0 citations62
US12387908B2Aug 12, 2025
Plasma treatment apparatus
TOKYO ELECTRON LTD0 citations62
US12020900B2Jun 25, 2024
Plasma processing device, and plasma processing method
TOKYO ELECTRON LTD0 citations62
US10937631B2Mar 2, 2021
Plasma processing apparatus and plasma processing method
TOKYO ELECTRON LTD1 citations62
US6747748B2Jun 8, 2004
Manufacturing method for a field-effect transistor, manufacturing method for a semiconductor device, and apparatus therefor
TOKYO ELECTRON LTD6 citations62
US11328904B2May 10, 2022
Substrate processing apparatus
TOKYO ELECTRON LTD0 citations60
US10734201B2Aug 4, 2020
Substrate processing apparatus
TOKYO ELECTRON LTD1 citations60
US12191124B2Jan 7, 2025
Plasma processing apparatus and plasma processing method
TOKYO ELECTRON LTD0 citations52
US11972921B2Apr 30, 2024
Temperature measurement system, temperature measurement method, and substrate processing apparatus
TOKYO ELECTRON LTD0 citations52
US11443920B2Sep 13, 2022
Plasma processing apparatus
TOKYO ELECTRON LTD0 citations52
US11410834B2Aug 9, 2022
Substrate processing method
TOKYO ELECTRON LTD0 citations52
US10746531B2Aug 18, 2020
Wear amount measuring apparatus and method, temperature measuring apparatus and method and substrate processing system
TOKYO ELECTRON LTD0 citations52
US10283328B2May 7, 2019
Plasma processing apparatus and plasma processing method
TOKYO ELECTRON LTD0 citations52
US9304050B2Apr 5, 2016
Temperature measurement apparatus and method
TOKYO ELECTRON LTD0 citations52
US8858753B2Oct 14, 2014
Focus ring heating method, plasma etching apparatus, and plasma etching method
TOKYO ELECTRON LTD1 citations52
US8651049B2Feb 18, 2014
Plasma processing apparatus
TOKYO ELECTRON LTD1 citations52
US12456605B2Oct 28, 2025
Plasma processing apparatus and plasma processing method
TOKYO ELECTRON LTD0 citations50
US12027344B2Jul 2, 2024
Film forming apparatus
TOKYO ELECTRON LTD0 citations49
MATSUDO TATSUO
6 patentsUS9070725B2Jun 30, 2015
Measuring apparatus and plasma processing apparatus
MATSUDO TATSUO7 citations83
US8730482B2May 20, 2014
Method for measuring wear rate
MATSUDO TATSUO8 citations83
US8573837B2Nov 5, 2013
Temperature measuring apparatus and temperature measuring method
MATSUDO TATSUO5 citations72
US8986494B2Mar 24, 2015
Plasma processing apparatus and temperature measuring method and apparatus used therein
MATSUDO TATSUO2 citations62
US9022645B2May 5, 2015
Plasma processing apparatus and temperature measuring method
MATSUDO TATSUO1 citations51
US8500326B2Aug 6, 2013
Probe for temperature measurement, temperature measuring system and temperature measuring method using the same
MATSUDO TATSUO0 citations51
ABE JUN
4 patentsUS8585284B2Nov 19, 2013
Temperature measurement apparatus and method
ABE JUN1 citations62
US8182142B2May 22, 2012
Temperature measuring apparatus and temperature measuring method
ABE JUN4 citations62
US8144332B2Mar 27, 2012
Temperature measurement apparatus and method
ABE JUN1 citations62
US8764288B2Jul 1, 2014
Temperature measuring apparatus and temperature measuring method
ABE JUN0 citations51
KOSHIMIZU CHISHIO
3 patentsUS8825434B2Sep 2, 2014
Temperature measuring method, storage medium, and program
KOSHIMIZU CHISHIO4 citations73
US8486221B2Jul 16, 2013
Focus ring heating method, plasma etching apparatus, and plasma etching method
KOSHIMIZU CHISHIO2 citations63
US8425791B2Apr 23, 2013
In-chamber member temperature control method, in-chamber member, substrate mounting table and plasma processing apparatus including same
KOSHIMIZU CHISHIO2 citations63
YAMAWAKU JUN
3 patentsUS8824875B2Sep 2, 2014
Method for heating part in processing chamber of semiconductor manufacturing apparatus and semiconductor manufacturing apparatus
YAMAWAKU JUN3 citations62
US8777483B2Jul 15, 2014
Temperature measuring apparatus and temperature measuring method
YAMAWAKU JUN0 citations52
US8523428B2Sep 3, 2013
Component in processing chamber of substrate processing apparatus and method of measuring temperature of the component
YAMAWAKU JUN1 citations52
HIMORI SHINJI
2 patentsTEXAS INSTRUMENTS INC
1 patentShowing the top 50 of 56 patents by PatentIndex Score.