Inventor
LEE ERIC M
US25 patents
⚠️ This page may combine multiple inventors who share the name “LEE ERIC M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
12 patentsUS9443725B2Sep 13, 2016
Multi-step system and method for curing a dielectric film
TOKYO ELECTRON LTD465 citations98
US9184047B2Nov 10, 2015
Multi-step system and method for curing a dielectric film
TOKYO ELECTRON LTD465 citations98
US7977256B2Jul 12, 2011
Method for removing a pore-generating material from an uncured low-k dielectric film
TOKYO ELECTRON LTD504 citations98
US7858533B2Dec 28, 2010
Method for curing a porous low dielectric constant dielectric film
TOKYO ELECTRON LTD522 citations98
US7622378B2Nov 24, 2009
Multi-step system and method for curing a dielectric film
TOKYO ELECTRON LTD487 citations98
US7405168B2Jul 29, 2008
Plural treatment step process for treating dielectric films
TOKYO ELECTRON LTD26 citations92
US7115993B2Oct 3, 2006
Structure comprising amorphous carbon film and method of forming thereof
TOKYO ELECTRON LTD37 citations91
US7901743B2Mar 8, 2011
Plasma-assisted vapor phase treatment of low dielectric constant films using a batch processing system
TOKYO ELECTRON LTD15 citations84
US7855123B2Dec 21, 2010
Method of integrating an air gap structure with a substrate
TOKYO ELECTRON LTD13 citations84
US7199046B2Apr 3, 2007
Structure comprising tunable anti-reflective coating and method of forming thereof
TOKYO ELECTRON LTD15 citations83
US10068765B2Sep 4, 2018
Multi-step system and method for curing a dielectric film
TOKYO ELECTRON LTD2 citations73
US8039049B2Oct 18, 2011
Treatment of low dielectric constant films using a batch processing system
TOKYO ELECTRON LTD5 citations62
LEE ERIC M
4 patentsUS9139910B2Sep 22, 2015
Method for chemical vapor deposition control
LEE ERIC M38 citations93
US8852347B2Oct 7, 2014
Apparatus for chemical vapor deposition control
LEE ERIC M40 citations93
US9212420B2Dec 15, 2015
Chemical vapor deposition method
LEE ERIC M6 citations71
US8956457B2Feb 17, 2015
Thermal processing system for curing dielectric films
LEE ERIC M0 citations40
TRUEVIEW LOGISTICS TECH LLC
3 patentsUS11720854B2Aug 8, 2023
Inventory management through image and data integration
TRUEVIEW LOGISTICS TECH LLC0 citations50
US11177036B2Nov 16, 2021
Inventory management through image and data integration
TRUEVIEW LOGISTICS TECH LLC0 citations50
US11823124B2Nov 21, 2023
Inventory management and delivery through image and data integration
TRUEVIEW LOGISTICS TECH LLC0 citations40