Inventor
SCHUMACHER MARCUS
DE4 patents
⚠️ This page may combine multiple inventors who share the name “SCHUMACHER MARCUS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
AIXTRON AG
2 patentsUS6849241B2Feb 1, 2005
Device and method for depositing one or more layers on a substrate
AIXTRON AG401 citations96
US7410670B2Aug 12, 2008
Process and apparatus for depositing single-component or multi-component layers and layer sequences using discontinuous injection of liquid and dissolved starting substances via a multi-channel injection unit
AIXTRON AG4 citations60