Inventor

OSUKA TSUTOMU

JP4 patents

⚠️ This page may combine multiple inventors who share the name “OSUKA TSUTOMU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

DAINIPPON SCREEN MFG

2 patents

US9403187B2Aug 2, 2016

Substrate processing method and substrate processing apparatus

DAINIPPON SCREEN MFG2 citations60

US9340761B2May 17, 2016

Substrate processing method and substrate processing apparatus

DAINIPPON SCREEN MFG1 citations50

SCREEN HOLDINGS CO LTD

2 patents

US11152204B2Oct 19, 2021

Substrate processing method and substrate processing apparatus

SCREEN HOLDINGS CO LTD0 citations48

US11676834B2Jun 13, 2023

Substrate processing method and substrate processing apparatus

SCREEN HOLDINGS CO LTD0 citations47