Inventor
YOSHIHARA NAOHIKO
JP15 patents
Patents
15 patentsUS9728443B2Aug 8, 2017
Substrate processing apparatus and substrate processing method
SCREEN HOLDINGS CO LTD6 citations83
US11465167B2Oct 11, 2022
Substrate treatment apparatus
SCREEN HOLDINGS CO LTD2 citations73
US10695792B2Jun 30, 2020
Substrate processing method and substrate processing apparatus
SCREEN HOLDINGS CO LTD2 citations73
US11139180B2Oct 5, 2021
Substrate processing apparatus and substrate processing method
SCREEN HOLDINGS CO LTD2 citations72
US10475670B2Nov 12, 2019
Substrate processing apparatus and substrate processing method
SCREEN HOLDINGS CO LTD2 citations72
US10249487B2Apr 2, 2019
Substrate processing method
SCREEN HOLDINGS CO LTD2 citations72
US9607844B2Mar 28, 2017
Substrate processing method and substrate processing apparatus
SCREEN HOLDINGS CO LTD3 citations70
US10964526B2Mar 30, 2021
Substrate processing method
SCREEN HOLDINGS CO LTD0 citations62
US10921057B2Feb 16, 2021
Substrate drying method and substrate processing apparatus
SCREEN HOLDINGS CO LTD1 citations62
US10760852B2Sep 1, 2020
Substrate drying method and substrate processing apparatus
SCREEN HOLDINGS CO LTD1 citations62
US10825713B2Nov 3, 2020
Substrate processing apparatus and substrate processing method
SCREEN HOLDINGS CO LTD0 citations51
US11152204B2Oct 19, 2021
Substrate processing method and substrate processing apparatus
SCREEN HOLDINGS CO LTD0 citations48
US11676834B2Jun 13, 2023
Substrate processing method and substrate processing apparatus
SCREEN HOLDINGS CO LTD0 citations47
US12532690B2Jan 20, 2026
Substrate processing apparatus and substrate processing method
SCREEN HOLDINGS CO LTD0 citations44
US10527348B2Jan 7, 2020
Substrate processing method and substrate processing apparatus
SCREEN HOLDINGS CO LTD0 citations41