Inventor
OKUTANI MANABU
JP38 patents
⚠️ This page may combine multiple inventors who share the name “OKUTANI MANABU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SCREEN HOLDINGS CO LTD
34 patentsUS9698031B2Jul 4, 2017
Substrate treatment method and substrate treatment apparatus
SCREEN HOLDINGS CO LTD468 citations99
US11289324B2Mar 29, 2022
Substrate treatment method and substrate treatment apparatus
SCREEN HOLDINGS CO LTD7 citations86
US9728443B2Aug 8, 2017
Substrate processing apparatus and substrate processing method
SCREEN HOLDINGS CO LTD6 citations83
US12046465B2Jul 23, 2024
Substrate treatment method and substrate treatment apparatus
SCREEN HOLDINGS CO LTD2 citations73
US11465167B2Oct 11, 2022
Substrate treatment apparatus
SCREEN HOLDINGS CO LTD2 citations73
US11335587B2May 17, 2022
Substrate processing apparatus and substrate processing meihod
SCREEN HOLDINGS CO LTD2 citations73
US10734271B2Aug 4, 2020
Substrate processing apparatus and substrate processing method
SCREEN HOLDINGS CO LTD4 citations73
US10695792B2Jun 30, 2020
Substrate processing method and substrate processing apparatus
SCREEN HOLDINGS CO LTD2 citations73
US9786522B2Oct 10, 2017
Substrate treatment method and substrate treatment apparatus
SCREEN HOLDINGS CO LTD3 citations73
US11404292B2Aug 2, 2022
Substrate processing method and substrate processing apparatus
SCREEN HOLDINGS CO LTD2 citations72
US11139180B2Oct 5, 2021
Substrate processing apparatus and substrate processing method
SCREEN HOLDINGS CO LTD2 citations72
US10475670B2Nov 12, 2019
Substrate processing apparatus and substrate processing method
SCREEN HOLDINGS CO LTD2 citations72
US10249487B2Apr 2, 2019
Substrate processing method
SCREEN HOLDINGS CO LTD2 citations72
US9455134B2Sep 27, 2016
Substrate processing method
SCREEN HOLDINGS CO LTD3 citations72
US11211241B2Dec 28, 2021
Substrate processing method and substrate processing apparatus
SCREEN HOLDINGS CO LTD4 citations71
US11101147B2Aug 24, 2021
Substrate processing method and substrate processing apparatus
SCREEN HOLDINGS CO LTD3 citations71
US10792712B2Oct 6, 2020
Substrate processing method and substrate processing apparatus
SCREEN HOLDINGS CO LTD6 citations71
US11217441B2Jan 4, 2022
Substrate treatment method and substrate treatment apparatus
SCREEN HOLDINGS CO LTD0 citations62
US11177124B2Nov 16, 2021
Substrate processing method and substrate processing apparatus
SCREEN HOLDINGS CO LTD1 citations62
US10964526B2Mar 30, 2021
Substrate processing method
SCREEN HOLDINGS CO LTD0 citations62
US10921057B2Feb 16, 2021
Substrate drying method and substrate processing apparatus
SCREEN HOLDINGS CO LTD1 citations62
US10760852B2Sep 1, 2020
Substrate drying method and substrate processing apparatus
SCREEN HOLDINGS CO LTD1 citations62
US10755916B2Aug 25, 2020
Substrate treatment method and substrate treatment apparatus
SCREEN HOLDINGS CO LTD1 citations62
US11901173B2Feb 13, 2024
Substrate processing method
SCREEN HOLDINGS CO LTD0 citations61
US11260431B2Mar 1, 2022
Substrate processing method and substrate processing apparatus
SCREEN HOLDINGS CO LTD1 citations61
US11469117B2Oct 11, 2022
Substrate processing apparatus, and substrate processing method
SCREEN HOLDINGS CO LTD0 citations51
US11302525B2Apr 12, 2022
Substrate processing method and substrate processing apparatus
SCREEN HOLDINGS CO LTD0 citations51
US10825713B2Nov 3, 2020
Substrate processing apparatus and substrate processing method
SCREEN HOLDINGS CO LTD0 citations51
US9852914B2Dec 26, 2017
Sacrificial-film removal method and substrate processing device
SCREEN HOLDINGS CO LTD1 citations51
US12042813B2Jul 23, 2024
Substrate processing method and substrate processing apparatus
SCREEN HOLDINGS CO LTD0 citations50
US11524314B2Dec 13, 2022
Substrate processing method and substrate processing device
SCREEN HOLDINGS CO LTD0 citations48
US11152204B2Oct 19, 2021
Substrate processing method and substrate processing apparatus
SCREEN HOLDINGS CO LTD0 citations48
US11676834B2Jun 13, 2023
Substrate processing method and substrate processing apparatus
SCREEN HOLDINGS CO LTD0 citations47
US10527348B2Jan 7, 2020
Substrate processing method and substrate processing apparatus
SCREEN HOLDINGS CO LTD0 citations41
DAINIPPON SCREEN MFG
3 patentsUS9768011B2Sep 19, 2017
Substrate treatment method and substrate treatment apparatus
DAINIPPON SCREEN MFG5 citations84
US9259758B2Feb 16, 2016
Substrate treatment method and substrate treatment apparatus
DAINIPPON SCREEN MFG5 citations71
US9005703B2Apr 14, 2015
Substrate processing method
DAINIPPON SCREEN MFG1 citations61