Inventor
HAGIWARA SHIGERU
JP17 patents
⚠️ This page may combine multiple inventors who share the name “HAGIWARA SHIGERU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NIKON CORP
11 patentsUS6153886ANov 28, 2000
Alignment apparatus in projection exposure apparatus
NIKON CORP175 citations99
US5906429AMay 25, 1999
Optical illumination device
NIKON CORP66 citations95
US5685895ANov 11, 1997
Air cleaning apparatus used for an exposure apparatus
NIKON CORP82 citations95
US6538723B2Mar 25, 2003
Scanning exposure in which an object and pulsed light are moved relatively, exposing a substrate by projecting a pattern on a mask onto the substrate with pulsed light from a light source, light sources therefor, and methods of manufacturing
NIKON CORP30 citations92
US6437851B2Aug 20, 2002
Exposure apparatus
NIKON CORP30 citations92
US6297871B1Oct 2, 2001
Exposure apparatus
NIKON CORP29 citations92
US6222610B1Apr 24, 2001
Exposure apparatus
NIKON CORP36 citations92
US6108126AAug 22, 2000
Illuminating apparatus
NIKON CORP25 citations92
US5381210AJan 10, 1995
Exposing apparatus
NIKON CORP49 citations92
US6686989B2Feb 3, 2004
Exposure apparatus
NIKON CORP11 citations73
US6583857B2Jun 24, 2003
Exposure apparatus and its making method, and device manufacturing method
NIKON CORP6 citations62
SONY CORP
2 patentsUS7889260B2Feb 15, 2011
Image signal processing circuit, image pickup apparatus and image signal processing method as well as computer program
SONY CORP8 citations83
US8040404B2Oct 18, 2011
Image pickup apparatus, image signal processing circuit and image signal processing method as well as computer program
SONY CORP2 citations62
HAGIWARA SHIGERU
2 patentsUS8175408B2May 8, 2012
Image signal processing apparatus, image pickup apparatus, image signal processing method, and computer program product
HAGIWARA SHIGERU10 citations81
US8497911B2Jul 30, 2013
Imaging device, imaging method and program for changing a bandwidth requirement for transmitting an image
HAGIWARA SHIGERU0 citations38