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Inventor

LA FONTAINE BRUNO M

US9 patents
⚠️ This page may combine multiple inventors who share the name “LA FONTAINE BRUNO M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ADVANCED MICRO DEVICES INC

4 patents
US6645679B1Nov 11, 2003

Attenuated phase shift mask for use in EUV lithography and a method of making such a mask

ADVANCED MICRO DEVICES INC51 citations92
US6556286B1Apr 29, 2003

Inspection system for the pupil of a lithographic tool

ADVANCED MICRO DEVICES INC24 citations92
US6608321B1Aug 19, 2003

Differential wavelength inspection system

ADVANCED MICRO DEVICES INC34 citations90
US6603543B1Aug 5, 2003

Inspection system with enhanced contrast

ADVANCED MICRO DEVICES INC13 citations82

ASML NETHERLANDS BV

2 patents
US9557650B2Jan 31, 2017

Transport system for an extreme ultraviolet light source

ASML NETHERLANDS BV5 citations70
US9560730B2Jan 31, 2017

Transport system for an extreme ultraviolet light source

ASML NETHERLANDS BV1 citations49

(unassigned)

1 patent
US6555274B1Apr 29, 2003

Pupil filtering for a lithographic tool

27 citations92

AT & T CORP

1 patent
US5498923AMar 12, 1996

Fluoresence imaging

AT & T CORP15 citations73

CYMER INC

1 patent
US10185234B2Jan 22, 2019

Harsh environment optical element protection

CYMER INC1 citations62