Inventor

HACKER VOLKER

DE5 patents

⚠️ This page may combine multiple inventors who share the name “HACKER VOLKER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

3 patents

US7928411B2Apr 19, 2011

Linear electron source, evaporator using linear electron source, and applications of electron sources

APPLIED MATERIALS INC8 citations81

US7550927B2Jun 23, 2009

System and method for generating ions and radicals

APPLIED MATERIALS INC3 citations61

US12209303B2Jan 28, 2025

Apparatus for providing a liquefied material, dosage system and method for dosing a liquefied material

APPLIED MATERIALS INC0 citations55

KLEMM GUENTER

1 patent

US8294115B2Oct 23, 2012

Linear electron source, evaporator using linear electron source, and applications of electron sources

KLEMM GUENTER0 citations48

HERMANNS UWE

1 patent

US9926627B2Mar 27, 2018

System and methods for processing a substrate

HERMANNS UWE0 citations35