Inventor
ASSAF SHAY
US12 patents
⚠️ This page may combine multiple inventors who share the name “ASSAF SHAY”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
11 patentsUS11581203B2Feb 14, 2023
Systems for integrating load locks into a factory interface footprint space
APPLIED MATERIALS INC7 citations85
US11232965B2Jan 25, 2022
Transport system
APPLIED MATERIALS INC9 citations83
US10361104B2Jul 23, 2019
Ambient controlled transfer module and process system
APPLIED MATERIALS INC3 citations70
US9959610B2May 1, 2018
System and method to detect substrate and/or substrate support misalignment using imaging
APPLIED MATERIALS INC2 citations69
US10665494B2May 26, 2020
Automated apparatus to temporarily attach substrates to carriers without adhesives for processing
APPLIED MATERIALS INC3 citations65
US12159796B2Dec 3, 2024
Systems and methods for integrating load locks into a factory interface footprint space
APPLIED MATERIALS INC0 citations62
US11894251B2Feb 6, 2024
Transport system
APPLIED MATERIALS INC0 citations60
US11204312B2Dec 21, 2021
In-situ full wafer metrology system
APPLIED MATERIALS INC0 citations60
US12142508B2Nov 12, 2024
Factory interface robots usable with integrated load locks
APPLIED MATERIALS INC0 citations59
US11817332B2Nov 14, 2023
Multi-wafer volume single transfer chamber facet
APPLIED MATERIALS INC0 citations51
US10818525B2Oct 27, 2020
Ambient controlled transfer module and process system
APPLIED MATERIALS INC0 citations49