Inventor
VAGOS PEDRO
FR10 patents
⚠️ This page may combine multiple inventors who share the name “VAGOS PEDRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NANOMETRICS INC
6 patentsUS10296554B2May 21, 2019
Correction of angular error of plane-of-incidence azimuth of optical metrology device
NANOMETRICS INC2 citations72
US9995689B2Jun 12, 2018
Optical metrology using differential fitting
NANOMETRICS INC3 citations71
US9958327B2May 1, 2018
Deconvolution to reduce the effective spot size of a spectroscopic optical metrology device
NANOMETRICS INC5 citations71
US10274367B2Apr 30, 2019
Deconvolution to reduce the effective spot size of a spectroscopic optical metrology device
NANOMETRICS INC1 citations61
US7410815B2Aug 12, 2008
Apparatus and method for non-contact assessment of a constituent in semiconductor substrates
NANOMETRICS INC2 citations60
US7751061B2Jul 6, 2010
Non-contact apparatus and method for measuring a property of a dielectric layer on a wafer
NANOMETRICS INC1 citations50
ONTO INNOVATION INC
3 patentsUS11346768B1May 31, 2022
Vortex polarimeter
ONTO INNOVATION INC15 citations79
US10621264B2Apr 14, 2020
Correction of angular error of plane-of-incidence azimuth of optical metrology device
ONTO INNOVATION INC2 citations72
US12092962B1Sep 17, 2024
Measurements of structures in presence of signal contaminations
ONTO INNOVATION INC0 citations55