Inventor
LERNER ALEXANDER N
US48 patents
⚠️ This page may combine multiple inventors who share the name “LERNER ALEXANDER N”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
32 patentsUS7378618B1May 27, 2008
Rapid conductive cooling using a secondary process plane
APPLIED MATERIALS INC400 citations99
US9390950B2Jul 12, 2016
Rapid thermal processing chamber with micro-positioning system
APPLIED MATERIALS INC15 citations92
US7812286B2Oct 12, 2010
Rapid conductive cooling using a secondary process plane
APPLIED MATERIALS INC18 citations92
US7223323B2May 29, 2007
Multi-chemistry plating system
APPLIED MATERIALS INC44 citations92
US7754518B2Jul 13, 2010
Millisecond annealing (DSA) edge protection
APPLIED MATERIALS INC15 citations91
US7513062B2Apr 7, 2009
Single wafer dryer and drying methods
APPLIED MATERIALS INC23 citations91
US9564349B2Feb 7, 2017
Rapid thermal processing chamber with micro-positioning system
APPLIED MATERIALS INC4 citations84
US8900889B2Dec 2, 2014
Rapid thermal processing chamber with micro-positioning system
APPLIED MATERIALS INC10 citations84
US7520939B2Apr 21, 2009
Integrated bevel clean chamber
APPLIED MATERIALS INC12 citations84
US8888916B2Nov 18, 2014
Thermal reactor with improved gas flow distribution
APPLIED MATERIALS INC6 citations82
US11692261B2Jul 4, 2023
Evaporator chamber for forming films on substrates
APPLIED MATERIALS INC2 citations73
US7923280B2Apr 12, 2011
Millisecond annealing (DSA) edge protection
APPLIED MATERIALS INC5 citations72
US9209049B2Dec 8, 2015
Rapid conductive cooling using a secondary process plane
APPLIED MATERIALS INC3 citations63
US11631813B2Apr 18, 2023
Deposition mask and methods of manufacturing and using a deposition mask
APPLIED MATERIALS INC1 citations62
US10692765B2Jun 23, 2020
Transfer arm for film frame substrate handling during plasma singulation of wafers
APPLIED MATERIALS INC1 citations62
US12473639B2Nov 18, 2025
Methods for forming films on substrates
APPLIED MATERIALS INC0 citations61
US11505863B2Nov 22, 2022
Methods for forming films on substrates
APPLIED MATERIALS INC0 citations61
USD969980SNov 15, 2022
Deposition chamber showerhead
APPLIED MATERIALS INC0 citations61
USD967351SOct 18, 2022
Showerhead reflector
APPLIED MATERIALS INC0 citations61
US11183411B2Nov 23, 2021
Method of pre aligning carrier, wafer and carrier-wafer combination for throughput efficiency
APPLIED MATERIALS INC0 citations60
US10916464B1Feb 9, 2021
Method of pre aligning carrier, wafer and carrier-wafer combination for throughput efficiency
APPLIED MATERIALS INC0 citations60
US11189516B2Nov 30, 2021
Method for mask and substrate alignment
APPLIED MATERIALS INC1 citations56
US11195756B2Dec 7, 2021
Proximity contact cover ring for plasma dicing
APPLIED MATERIALS INC0 citations52
US11158540B2Oct 26, 2021
Light-absorbing mask for hybrid laser scribing and plasma etch wafer singulation process
APPLIED MATERIALS INC0 citations52
US9793132B1Oct 17, 2017
Etch mask for hybrid laser scribing and plasma etch wafer singulation process
APPLIED MATERIALS INC1 citations52
US7923660B2Apr 12, 2011
Pulsed laser anneal system architecture
APPLIED MATERIALS INC0 citations52
US11756816B2Sep 12, 2023
Carrier FOUP and a method of placing a carrier
APPLIED MATERIALS INC0 citations50
US11637004B2Apr 25, 2023
Alignment module with a cleaning chamber
APPLIED MATERIALS INC0 citations50
US11538706B2Dec 27, 2022
System and method for aligning a mask with a substrate
APPLIED MATERIALS INC0 citations50
US11196360B2Dec 7, 2021
System and method for electrostatically chucking a substrate to a carrier
APPLIED MATERIALS INC0 citations50
US6865937B2Mar 15, 2005
Deionized water spray on loss of fluid processing tank exhaust
APPLIED MATERIALS INC1 citations48
US11414740B2Aug 16, 2022
Processing system for forming layers
APPLIED MATERIALS INC0 citations47
KOELMEL BLAKE
5 patentsUS8057602B2Nov 15, 2011
Apparatus and method for supporting, positioning and rotating a substrate in a processing chamber
KOELMEL BLAKE63 citations97
US8057601B2Nov 15, 2011
Apparatus and method for supporting, positioning and rotating a substrate in a processing chamber
KOELMEL BLAKE11 citations84
US8490660B2Jul 23, 2013
Apparatus and method for supporting, positioning and rotating a substrate in a processing chamber
KOELMEL BLAKE3 citations62
US8309475B2Nov 13, 2012
Apparatus and method of aligning and positioning a cold substrate on a hot surface
KOELMEL BLAKE2 citations62
US8097543B2Jan 17, 2012
Apparatus and method of aligning and positioning a cold substrate on a hot surface
KOELMEL BLAKE1 citations52
SORABJI KHURSHED
4 patentsUS8314371B2Nov 20, 2012
Rapid thermal processing chamber with micro-positioning system
SORABJI KHURSHED18 citations92
US8227729B2Jul 24, 2012
Rapid conductive cooling using a secondary process plane
SORABJI KHURSHED12 citations92
US8111978B2Feb 7, 2012
Rapid thermal processing chamber with shower head
SORABJI KHURSHED21 citations92
US8658947B2Feb 25, 2014
Rapid conductive cooling using a secondary process plane
SORABJI KHURSHED8 citations84