Inventor

HUANG JUNQING (JENNY)

US4 patents

⚠️ This page may combine multiple inventors who share the name “HUANG JUNQING (JENNY)”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CHEN LU

2 patents

US8223327B2Jul 17, 2012

Systems and methods for detecting defects on a wafer

CHEN LU24 citations91

US8467047B2Jun 18, 2013

Systems and methods for detecting defects on a wafer

CHEN LU5 citations83

KLA TENCOR CORP

2 patents

US9880107B2Jan 30, 2018

Systems and methods for detecting defects on a wafer

KLA TENCOR CORP5 citations83

US10605744B2Mar 31, 2020

Systems and methods for detecting defects on a wafer

KLA TENCOR CORP3 citations72