Inventor

WALLINGFORD RICHARD

US27 patents

⚠️ This page may combine multiple inventors who share the name “WALLINGFORD RICHARD”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

WALLINGFORD RICHARD

KLA TENCOR CORP

Apparatus and methods for finding a best aperture and mode to enhance defect detection

Methods for generating a standard reference die for use in a die to standard reference die inspection and methods for inspecting a wafer

Systems and methods for detecting defects on a wafer

Systems and methods for defect detection using image reconstruction

Active learning for defect classifier training

Systems and methods for detecting defects on a wafer

Optical-mode selection for multi-mode semiconductor inspection

Data augmentation for convolutional neural network-based defect inspection

Method and system for mixed mode wafer inspection

Method and system for mixed mode wafer inspection

Apparatus and methods for finding a best aperture and mode to enhance defect detection

Computer-implemented methods, carrier media, and systems for selecting polarization settings for an inspection system

KLA CORP

Deep learning based defect detection

Automated focusing system for tracking specimen surface with a configurable focus offset

Semantic image segmentation for semiconductor-based applications

System and method for inspection using tensor decomposition and singular value decomposition

Automated focusing system for tracking specimen surface with a configurable focus offset

Deep generative model-based alignment for semiconductor applications

Determining focus settings for specimen scans

System and method for optical wafer characterization with image up-sampling

CHEN LU

Systems and methods for detecting defects on a wafer

Systems and methods for detecting defects on a wafer

KLA TENCOR TECH CORP

Computer-implemented methods, carrier media, and systems for determining sizes of defects detected on a wafer

Methods for identifying array areas in dies formed on a wafer and methods for setting up such methods

HUANG JUNQING

Detecting defects on a wafer

KULKARNI ASHOK

Semiconductor device property extraction, generation, visualization, and monitoring methods

BHASKAR KRIS

Methods for generating a standard reference die for use in a die to standard reference die inspection and methods for inspecting a wafer