Inventor
OSADA NAOYUKI
JP10 patents
⚠️ This page may combine multiple inventors who share the name “OSADA NAOYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SCREEN HOLDINGS CO LTD
6 patentsUS10790169B2Sep 29, 2020
Substrate processing apparatus
SCREEN HOLDINGS CO LTD2 citations72
US11260436B2Mar 1, 2022
Substrate processing apparatus and substrate processing method
SCREEN HOLDINGS CO LTD0 citations49
US9802227B2Oct 31, 2017
Method of cleaning substrate processing apparatus
SCREEN HOLDINGS CO LTD0 citations49
US10395952B2Aug 27, 2019
Substrate processing apparatus and substrate processing method
SCREEN HOLDINGS CO LTD0 citations40
US9740648B2Aug 22, 2017
Substrate treatment apparatus that controls respective units by master-slave method
SCREEN HOLDINGS CO LTD0 citations40
US10717117B2Jul 21, 2020
Substrate processing apparatus and substrate processing method
SCREEN HOLDINGS CO LTD0 citations39
OSADA NAOYUKI
3 patentsUS9378988B2Jun 28, 2016
Substrate processing apparatus and substrate processing method using processing solution
OSADA NAOYUKI17 citations79
US9027577B2May 12, 2015
Nozzle and a substrate processing apparatus including the same
OSADA NAOYUKI1 citations48
US9190300B2Nov 17, 2015
Method of cleaning substrate processing apparatus
OSADA NAOYUKI0 citations47