Inventor
FUJITA ERI
JP6 patents
⚠️ This page may combine multiple inventors who share the name “FUJITA ERI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SCREEN HOLDINGS CO LTD
4 patentsUS11260436B2Mar 1, 2022
Substrate processing apparatus and substrate processing method
SCREEN HOLDINGS CO LTD0 citations49
US11094564B2Aug 17, 2021
Processing liquid supplying apparatus, substrate processing apparatus and processing liquid supplying method
SCREEN HOLDINGS CO LTD0 citations41
US10717117B2Jul 21, 2020
Substrate processing apparatus and substrate processing method
SCREEN HOLDINGS CO LTD0 citations39
US10816141B2Oct 27, 2020
Chemical solution feeder, substrate treatment apparatus, method for feeding chemical solution, and method for treating substrate
SCREEN HOLDINGS CO LTD0 citations37