Inventor
IWASAKI AKIHISA
JP13 patents
⚠️ This page may combine multiple inventors who share the name “IWASAKI AKIHISA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SCREEN HOLDINGS CO LTD
9 patentsUS10892177B2Jan 12, 2021
Substrate processing method and substrate processing apparatus
SCREEN HOLDINGS CO LTD2 citations71
US10755951B2Aug 25, 2020
Substrate processing apparatus and substrate processing method
SCREEN HOLDINGS CO LTD2 citations69
US11660644B2May 30, 2023
Substrate processing method and substrate processing device
SCREEN HOLDINGS CO LTD1 citations62
US10622204B2Apr 14, 2020
Substrate processing apparatus and substrate processing method
SCREEN HOLDINGS CO LTD1 citations61
US12065746B2Aug 20, 2024
Substrate processing method and substrate processing apparatus
SCREEN HOLDINGS CO LTD0 citations51
US11018017B2May 25, 2021
Substrate treatment method
SCREEN HOLDINGS CO LTD0 citations50
US11260436B2Mar 1, 2022
Substrate processing apparatus and substrate processing method
SCREEN HOLDINGS CO LTD0 citations49
US9997382B2Jun 12, 2018
Substrate processing apparatus and substrate processing method
SCREEN HOLDINGS CO LTD0 citations48
US10717117B2Jul 21, 2020
Substrate processing apparatus and substrate processing method
SCREEN HOLDINGS CO LTD0 citations39
PANASONIC CORP
3 patentsUS7977239B2Jul 12, 2011
Semiconductor device and method for fabricating the same
PANASONIC CORP8 citations82
US8994183B2Mar 31, 2015
Multilayer interconnects with an extension part
PANASONIC CORP5 citations67
US7843073B2Nov 30, 2010
Semiconductor device and method for fabricating the same
PANASONIC CORP4 citations61