Inventor
IWAHATA SHOTA
JP8 patents
Patents
8 patentsUS10651029B2May 12, 2020
Substrate processing apparatus and substrate processing method
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US10886133B2Jan 5, 2021
Substrate processing method and substrate processing device
SCREEN HOLDINGS CO LTD1 citations61
US10615026B2Apr 7, 2020
Substrate processing method and substrate processing apparatus
SCREEN HOLDINGS CO LTD1 citations60
US12442066B2Oct 14, 2025
Substrate processing method
SCREEN HOLDINGS CO LTD0 citations49
US11260436B2Mar 1, 2022
Substrate processing apparatus and substrate processing method
SCREEN HOLDINGS CO LTD0 citations49
US11094564B2Aug 17, 2021
Processing liquid supplying apparatus, substrate processing apparatus and processing liquid supplying method
SCREEN HOLDINGS CO LTD0 citations41
US10717117B2Jul 21, 2020
Substrate processing apparatus and substrate processing method
SCREEN HOLDINGS CO LTD0 citations39
US10816141B2Oct 27, 2020
Chemical solution feeder, substrate treatment apparatus, method for feeding chemical solution, and method for treating substrate
SCREEN HOLDINGS CO LTD0 citations37