Inventor
NAKADA HYAKKA
JP12 patents
⚠️ This page may combine multiple inventors who share the name “NAKADA HYAKKA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
8 patentsUS11152237B2Oct 19, 2021
Substitute sample, method for determining control parameter of processing, and measurement system
HITACHI LTD2 citations72
US11287782B2Mar 29, 2022
Computer, method for determining processing control parameter, substitute sample, measurement system, and measurement method
HITACHI LTD1 citations62
US10627788B2Apr 21, 2020
Retrieval apparatus and retrieval method for semiconductor device processing
HITACHI LTD1 citations62
US11393084B2Jul 19, 2022
Processing recipe generation device
HITACHI LTD1 citations61
US12511574B2Dec 30, 2025
Processing condition search device and processing condition search method
HITACHI LTD0 citations51
US11112775B2Sep 7, 2021
System and method of determining processing condition
HITACHI LTD0 citations51
US12036609B2Jul 16, 2024
Additive manufacturing condition search apparatus, additive manufacturing condition search method, and reference sample
HITACHI LTD0 citations50
US11609188B2Mar 21, 2023
Processing condition determination system and processing condition searching method
HITACHI LTD0 citations50
HITACHI HIGH TECH CORP
4 patentsUS11907235B2Feb 20, 2024
Plasma processing apparatus including predictive control
HITACHI HIGH TECH CORP2 citations71
US11657059B2May 23, 2023
Search device, searching method, and plasma processing apparatus
HITACHI HIGH TECH CORP2 citations71
US12094146B2Sep 17, 2024
Contour analysis apparatus, processing condition determination system, shape estimation system, semiconductor device manufacturing system, search apparatus, and data structure used in them
HITACHI HIGH TECH CORP0 citations61
US11189470B2Nov 30, 2021
Search device, search method and plasma processing apparatus
HITACHI HIGH TECH CORP0 citations51