Inventor
TORII NATSUMI
JP6 patents
Patents
6 patentsUS10431433B2Oct 1, 2019
Plasma processing apparatus and plasma processing method
TOKYO ELECTRON LTD7 citations82
US11646181B2May 9, 2023
Plasma processing apparatus and plasma processing method
TOKYO ELECTRON LTD2 citations71
US12165849B2Dec 10, 2024
Plasma processing apparatus and etching method
TOKYO ELECTRON LTD2 citations68
US10727028B2Jul 28, 2020
Matching device and plasma processing apparatus
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US12261027B2Mar 25, 2025
Plasma processing apparatus and plasma processing method
TOKYO ELECTRON LTD0 citations62
US12136541B2Nov 5, 2024
Wiring abnormality detection method and plasma processing apparatus
TOKYO ELECTRON LTD0 citations47