Inventor
WANG CHENGFEI
CN4 patents
Patents
4 patentsUS12121873B2Oct 22, 2024
Gas-solid separation structure, feeding device and electrochemical deposition apparatus
BOE TECHNOLOGY GROUP CO LTD0 citations58
US12024787B2Jul 2, 2024
Filling device and apparatus, electrochemical deposition system and filling method
BOE TECHNOLOGY GROUP CO LTD0 citations46
US11707834B2Jul 25, 2023
Substrate transfer device
BOE TECHNOLOGY GROUP CO LTD0 citations46
US11686010B2Jun 27, 2023
Carrier liquid leakage preventing device and electrochemical deposition apparatus
BOE TECHNOLOGY GROUP CO LTD0 citations46