Inventor

METZ ANDREW

US27 patents

⚠️ This page may combine multiple inventors who share the name “METZ ANDREW”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

METZ ANDREW

TOKYO ELECTRON LTD

Method of forming self-aligned contacts using a replacement metal gate process in a semiconductor device

Non-atomic layer deposition (ALD) method of forming sidewall passivation layer during high aspect ratio carbon layer etch

Methods for forming self-aligned contacts using spin-on silicon carbide

Method of forming a FET structure by selective deposition of film on source/drain contact

Manufacturing methods for mandrel pull from spacers for multi-color patterning

In-situ focus ring coating

Plasma etching tools and systems

Methods for forming self-aligned contacts using spin-on silicon carbide

Forming contact holes with controlled local critical dimension uniformity

Non-atomic layer deposition (ALD) method of forming sidewall passivation layer during high aspect ratio carbon layer etch

Cyclic plasma etching of carbon-containing materials

Systems and methods to control critical dimension (CD) shrink ratio through radio frequency (RF) pulsing

Methods and systems for etching silicon cyanide (SiCN) with multi-color selectivity

Metal hard mask layers for processing of microelectronic workpieces

Method of anisotropically etching adjacent lines with multi-color selectivity

Variable hardness amorphous carbon mask

Sacrificial capping layer for contact etch

Technologies for high aspect ratio carbon etching with inserted charge dissipation layer

Recessed contact structures and methods

Localized etch stop layer

Forming a semiconductor device using a protective layer

Method utilizing using post etch pattern encapsulation

Cyclic plasma processing

Sacrificial capping layer for gate protection

Contact openings in semiconductor devices

Method for increasing oxide etch selectivity

MARKS TOBIN J

Transparent conducting oxide thin films and related devices