Inventor
THIBAUT SOPHIE
US5 patents
Patents
5 patentsUS10354873B2Jul 16, 2019
Organic mandrel protection process
TOKYO ELECTRON LTD340 citations98
US10727057B2Jul 28, 2020
Platform and method of operating for integrated end-to-end self-aligned multi-patterning process
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US11398379B2Jul 26, 2022
Platform and method of operating for integrated end-to-end self-aligned multi-patterning process
TOKYO ELECTRON LTD0 citations62
US10748769B2Aug 18, 2020
Methods and systems for patterning of low aspect ratio stacks
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US12211911B2Jan 28, 2025
Recessed contact structures and methods
TOKYO ELECTRON LTD0 citations56