Inventor
CHO HYEONG JUN
KR5 patents
Patents
5 patentsUS11919303B2Mar 5, 2024
Jetting driver and substrate treatment apparatus and method
SEMES CO LTD0 citations59
US12134271B2Nov 5, 2024
Pressure control device and substrate treatment apparatus including the same
SEMES CO LTD0 citations51
US12240259B2Mar 4, 2025
Substrate processing device and control method for substrate processing device
SEMES CO LTD0 citations49
US12524025B2Jan 13, 2026
Apparatus for treating substrate and method for treating a substrate
SEMES CO LTD0 citations48
US12560430B2Feb 24, 2026
Level sensor module and portable level measuring apparatus
SEMES CO LTD0 citations47