Inventor
SON SANG HYUN
KR14 patents
⚠️ This page may combine multiple inventors who share the name “SON SANG HYUN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SEMES CO LTD
12 patentsUS11756815B2Sep 12, 2023
Apparatus for and method of monitoring warpage of substrate, substrate treatment apparatus, and substrate-type sensor
SEMES CO LTD4 citations70
US11919303B2Mar 5, 2024
Jetting driver and substrate treatment apparatus and method
SEMES CO LTD0 citations59
US11703520B2Jul 18, 2023
Wafer type sensor unit and data acquisition method using the wafer type sensor unit
SEMES CO LTD0 citations59
US11933808B2Mar 19, 2024
Buffer unit and method for storaging substrate type sensor for measuring of horizontality of a substrate support member provided on a temperature varying atmosphere
SEMES CO LTD0 citations57
US12061097B2Aug 13, 2024
Substrate type sensor for measuring horizontality of substrate support member provided in atmosphere accompanied by temperature change, method for measuring horizontality of substrate support member by using the same, and non-transitory computer readable medium
SEMES CO LTD0 citations56
US12235663B2Feb 25, 2025
Apparatus for controlling flow rate and method of controlling flow rate
SEMES CO LTD0 citations55
US12224189B2Feb 11, 2025
Substrate type sensor and method of measuring the impact point and the impact force of chemical
SEMES CO LTD0 citations54
US12240259B2Mar 4, 2025
Substrate processing device and control method for substrate processing device
SEMES CO LTD0 citations49
US12524025B2Jan 13, 2026
Apparatus for treating substrate and method for treating a substrate
SEMES CO LTD0 citations48
US12472621B2Nov 18, 2025
Teaching method, program stored in the medium for executing the teaching method and transfer system
SEMES CO LTD0 citations48
US12317419B2May 27, 2025
Apparatus for temperature measurement and method of processing substrate
SEMES CO LTD0 citations48
US12560430B2Feb 24, 2026
Level sensor module and portable level measuring apparatus
SEMES CO LTD0 citations47