Inventor
HIROKI TUTOMU
JP4 patents
Patents
4 patentsUS5636960AJun 10, 1997
Apparatus for detecting and aligning a substrate
TOKYO ELECTRON LTD77 citations93
US5509771AApr 23, 1996
Vacuum processing apparatus
TOKYO ELECTRON LTD94 citations93
US5558482ASep 24, 1996
Multi-chamber system
TOKYO ELECTRON LTD51 citations90
US5306380AApr 26, 1994
Vacuum processing apparatus
TOKYO ELECTRON LTD48 citations89