Inventor
TSUKUNE ATSUHIRO
JP10 patents
⚠️ This page may combine multiple inventors who share the name “TSUKUNE ATSUHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
FUJITSU LTD
7 patentsUS5609721AMar 11, 1997
Semiconductor device manufacturing apparatus and its cleaning method
FUJITSU LTD112 citations95
US4804560AFeb 14, 1989
Method of selectively depositing tungsten upon a semiconductor substrate
FUJITSU LTD125 citations94
US6635523B1Oct 21, 2003
Semiconductor device and method of manufacturing the same
FUJITSU LTD30 citations92
US5041311AAug 20, 1991
Chemical vapor deposition method using a plasma self-cleaning
FUJITSU LTD29 citations92
US5233163AAug 3, 1993
Graphite columnar heating body for semiconductor wafer heating
FUJITSU LTD14 citations74
US6344363B1Feb 5, 2002
Method of making ferroelectric film with protective cover film against hydrogen and moisture
FUJITSU LTD9 citations71
US4781945ANov 1, 1988
Process for the formation of phosphosilicate glass coating
FUJITSU LTD14 citations70