Inventor
KAWAJIRI TETSUYA
JP15 patents
⚠️ This page may combine multiple inventors who share the name “KAWAJIRI TETSUYA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NGK INSULATORS LTD
12 patentsUS6292346B1Sep 18, 2001
Equipment for holding a semiconductor wafer, a method for manufacturing the same, and a method for using the same
NGK INSULATORS LTD32 citations92
US7848075B2Dec 7, 2010
Electrostatic chuck with heater
NGK INSULATORS LTD10 citations84
US7416793B2Aug 26, 2008
Electrostatic chuck and manufacturing method for the same, and alumina sintered member and manufacturing method for the same
NGK INSULATORS LTD8 citations71
US11456189B2Sep 27, 2022
Member for semiconductor manufacturing apparatuses
NGK INSULATORS LTD2 citations69
US9126384B2Sep 8, 2015
Bonded body of ceramic member and metal member and method for manufacturing the same
NGK INSULATORS LTD2 citations61
US6728091B2Apr 27, 2004
Electrostatic adsorption device
NGK INSULATORS LTD6 citations60
US7353979B2Apr 8, 2008
Method of fabricating substrate placing stage
NGK INSULATORS LTD3 citations59
US7067200B2Jun 27, 2006
Joined bodies and a method of producing the same
NGK INSULATORS LTD0 citations52
US10332771B2Jun 25, 2019
Joined body manufacturing method and joined body
NGK INSULATORS LTD0 citations51
US10150709B2Dec 11, 2018
Joined body manufacturing method
NGK INSULATORS LTD1 citations51
US10037910B2Jul 31, 2018
Wafer holder and method for manufacturing the same
NGK INSULATORS LTD0 citations45
US10814436B2Oct 27, 2020
Joined body including ceramic member and metallic member and method for manufacturing joined body
NGK INSULATORS LTD0 citations40