Inventor

RETZLAFF UDO HEINZ

DE4 patents

⚠️ This page may combine multiple inventors who share the name “RETZLAFF UDO HEINZ”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

GEN ELECTRIC

2 patents

US6368410B1Apr 9, 2002

Semiconductor processing article

GEN ELECTRIC82 citations95

US6706205B2Mar 16, 2004

Semiconductor processing article

GEN ELECTRIC7 citations71

RETZLAFF UDO HEINZ

2 patents

US7564672B2Jul 21, 2009

Transfer-ESC based on a wafer

RETZLAFF UDO HEINZ9 citations78

US7652867B2Jan 26, 2010

Mobile, transportable, electrostatic chuck for wafers made of semiconductor material

RETZLAFF UDO HEINZ7 citations68