Inventor
CHEN SHAOYIN
SG4 patents
⚠️ This page may combine multiple inventors who share the name “CHEN SHAOYIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ULTRATECH INC
3 patentsUS6844250B1Jan 18, 2005
Method and system for laser thermal processing of semiconductor devices
ULTRATECH INC25 citations90
US7612372B1Nov 3, 2009
Method and system for laser thermal processing of semiconductor devices
ULTRATECH INC4 citations60
US9401277B2Jul 26, 2016
Substrate processing with reduced warpage and/or controlled strain
ULTRATECH INC1 citations49