Inventor

OHNO HARUKO

JP3 patents

Patents

3 patents

US6558478B1May 6, 2003

Method of and apparatus for cleaning substrate

EBARA CORP65 citations94

US6745784B2Jun 8, 2004

Method of and apparatus for cleaning substrate

EBARA CORP11 citations71

US6776919B2Aug 17, 2004

Method and apparatus for etching ruthenium films

EBARA CORP4 citations60