Inventor
KATAKABE ICHIRO
JP12 patents
⚠️ This page may combine multiple inventors who share the name “KATAKABE ICHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
EBARA CORP
7 patentsUS6558478B1May 6, 2003
Method of and apparatus for cleaning substrate
EBARA CORP65 citations94
US6921466B2Jul 26, 2005
Revolution member supporting apparatus and semiconductor substrate processing apparatus
EBARA CORP48 citations92
US7578886B2Aug 25, 2009
Substrate processing apparatus, substrate processing method, and substrate holding apparatus
EBARA CORP14 citations81
US6745784B2Jun 8, 2004
Method of and apparatus for cleaning substrate
EBARA CORP11 citations71
US6776919B2Aug 17, 2004
Method and apparatus for etching ruthenium films
EBARA CORP4 citations60
US7578887B2Aug 25, 2009
Apparatus for and method of processing substrate
EBARA CORP3 citations59
US7309449B2Dec 18, 2007
Substrate processing method
EBARA CORP4 citations58
TOSHIBA KK
5 patentsUS5643046AJul 1, 1997
Polishing method and apparatus for detecting a polishing end point of a semiconductor wafer
TOSHIBA KK207 citations98
US5605488AFeb 25, 1997
Polishing apparatus of semiconductor wafer
TOSHIBA KK192 citations96
US5943578AAug 24, 1999
Method of manufacturing a semiconductor device having an element isolating region
TOSHIBA KK25 citations92
US5880032AMar 9, 1999
Method and apparatus for manufacturing a semiconductor device
TOSHIBA KK28 citations92
US5878191AMar 2, 1999
Heat treatment apparatus for semiconductor wafers
TOSHIBA KK22 citations92