Inventor

IWASAKI YUICHI

JP22 patents

⚠️ This page may combine multiple inventors who share the name “IWASAKI YUICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

IWASAKI YUICHI

CANON KK

Method for forming fine structure

Method of forming an optical element

Fine structure and devices employing it

Array structure and method of manufacturing the same, charged particle beam exposure apparatus, and device manufacturing method

Multiple exposure device formation

Method of manufacturing diffractive optical element

Ejection-material ejection apparatus and imprinting apparatus

Ejection-material ejection apparatus and imprinting apparatus

Immersion exposure apparatus and device manufacturing method

Ejection material filling device, pressure regulation device, and ejection material filling method

Lithography apparatus, and method of manufacturing article

Storage device, ejection-material ejection device, and imprint apparatus

Exposure apparatus

Liquid discharge apparatus and imprint apparatus

NISSAN MOTOR

Drive device

Switching device and method for controlling switching device

Semiconductor device and method for manufacturing same

Semiconductor device and manufacturing method thereof

HITACHI LTD

Deflector, method of manufacturing deflector, and charged particle beam exposure apparatus

Deflector, method of manufacturing deflector, and charged particle beam exposure apparatus

SHIMODA IKUO

Active dynamic vibration absorber

CANON KABISHIKI KAISHA

Exposure apparatus