Inventor

MOLONEY GERARD S

US10 patents

⚠️ This page may combine multiple inventors who share the name “MOLONEY GERARD S”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MULTI PLANAR TECHNOLOGIES INC

6 patents

US6558232B1May 6, 2003

System and method for CMP having multi-pressure zone loading for improved edge and annular zone material removal control

MULTI PLANAR TECHNOLOGIES INC92 citations96

US6506105B1Jan 14, 2003

System and method for pneumatic diaphragm CMP head having separate retaining ring and multi-region wafer pressure control

MULTI PLANAR TECHNOLOGIES INC105 citations96

US6893327B2May 17, 2005

Chemical mechanical polishing apparatus and method having a retaining ring with a contoured surface

MULTI PLANAR TECHNOLOGIES INC42 citations92

US6527625B1Mar 4, 2003

Chemical mechanical polishing apparatus and method having a soft backed polishing head

MULTI PLANAR TECHNOLOGIES INC21 citations92

US6966822B2Nov 22, 2005

System and method for CMP having multi-pressure zone loading for improved edge and annular zone material removal control

MULTI PLANAR TECHNOLOGIES INC18 citations91

US6623343B2Sep 23, 2003

System and method for CMP head having multi-pressure annular zone subcarrier material removal control

MULTI PLANAR TECHNOLOGIES INC51 citations91

EBARA CORP

1 patent

US7044838B2May 16, 2006

Chemical mechanical polishing head assembly having floating wafer carrier and retaining ring

EBARA CORP65 citations95

MITSUBISHI MATERIALS CORP

1 patent

US6309290B1Oct 30, 2001

Chemical mechanical polishing head having floating wafer retaining ring and wafer carrier with multi-zone polishing pressure control

MITSUBISHI MATERIALS CORP46 citations94

MULTIPLANAR TECHNOLOGIES INC

1 patent

US7118456B2Oct 10, 2006

Polishing head, retaining ring for use therewith and method fo polishing a substrate

MULTIPLANAR TECHNOLOGIES INC13 citations79

MULTI PLANAR TECHNOLOGYIES INC

1 patent

US6641461B2Nov 4, 2003

Chemical mechanical polishing apparatus having edge, center and annular zone control of material removal

MULTI PLANAR TECHNOLOGYIES INC4 citations57