Inventor

DYSON JR WILLIAM

US5 patents

⚠️ This page may combine multiple inventors who share the name “DYSON JR WILLIAM”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MITSUBISHI MATERIALS CORP

2 patents

US6231428B1May 15, 2001

Chemical mechanical polishing head assembly having floating wafer carrier and retaining ring

MITSUBISHI MATERIALS CORP85 citations95

US6309290B1Oct 30, 2001

Chemical mechanical polishing head having floating wafer retaining ring and wafer carrier with multi-zone polishing pressure control

MITSUBISHI MATERIALS CORP46 citations94

ONTRAK SYSTEMS INC

2 patents

US6059889AMay 9, 2000

Method for processing a substrate using a system having a roller with treading

ONTRAK SYSTEMS INC25 citations89

US5862560AJan 26, 1999

Roller with treading and system including the same

ONTRAK SYSTEMS INC27 citations89

EBARA CORP

1 patent

US7044838B2May 16, 2006

Chemical mechanical polishing head assembly having floating wafer carrier and retaining ring

EBARA CORP65 citations95