Inventor
DICKEY TANLIN K
US3 patents
⚠️ This page may combine multiple inventors who share the name “DICKEY TANLIN K”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MITSUBISHI MATERIALS CORP
2 patentsUS6231428B1May 15, 2001
Chemical mechanical polishing head assembly having floating wafer carrier and retaining ring
MITSUBISHI MATERIALS CORP85 citations95
US6309290B1Oct 30, 2001
Chemical mechanical polishing head having floating wafer retaining ring and wafer carrier with multi-zone polishing pressure control
MITSUBISHI MATERIALS CORP46 citations94