Inventor
MOOSMAN BRYAN
US4 patents
Patents
4 patentsUS6690706B2Feb 10, 2004
High rep-rate laser with improved electrodes
CYMER INC17 citations83
US6937635B2Aug 30, 2005
High rep-rate laser with improved electrodes
CYMER INC7 citations71
US7339973B2Mar 4, 2008
Electrodes for fluorine gas discharge lasers
CYMER INC2 citations61
US7132123B2Nov 7, 2006
High rep-rate laser with improved electrodes
CYMER INC3 citations60