Inventor
CARMICHAEL JAMES A
US6 patents
⚠️ This page may combine multiple inventors who share the name “CARMICHAEL JAMES A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CYMER INC
4 patentsUS7522650B2Apr 21, 2009
Gas discharge laser chamber improvements
CYMER INC8 citations82
US6963595B2Nov 8, 2005
Automatic gas control system for a gas discharge laser
CYMER INC20 citations81
US7706424B2Apr 27, 2010
Gas discharge laser system electrodes and power supply for delivering electrical energy to same
CYMER INC6 citations62
US7339973B2Mar 4, 2008
Electrodes for fluorine gas discharge lasers
CYMER INC2 citations61