Inventor
ISOMURA IKUNAO
JP30 patents
⚠️ This page may combine multiple inventors who share the name “ISOMURA IKUNAO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NUFLARE TECHNOLOGY INC
12 patentsUS9535015B2Jan 3, 2017
Pattern inspection method and pattern inspection apparatus
NUFLARE TECHNOLOGY INC15 citations84
US10026011B2Jul 17, 2018
Mask inspection apparatus, mask evaluation method and mask evaluation system
NUFLARE TECHNOLOGY INC6 citations73
US9728373B2Aug 8, 2017
Pattern inspection apparatus and pattern inspection method
NUFLARE TECHNOLOGY INC4 citations73
US8861832B2Oct 14, 2014
Inspection system and method
NUFLARE TECHNOLOGY INC4 citations73
US9767547B2Sep 19, 2017
Inspection method and inspection apparatus
NUFLARE TECHNOLOGY INC2 citations69
US10290094B2May 14, 2019
Pattern inspection apparatus and pattern inspection method
NUFLARE TECHNOLOGY INC1 citations62
US9235883B2Jan 12, 2016
Inspection system and method
NUFLARE TECHNOLOGY INC1 citations52
US11443419B2Sep 13, 2022
Reference image generation method and pattern inspection method
NUFLARE TECHNOLOGY INC0 citations47
US9230317B2Jan 5, 2016
Inspection method and inspection apparatus
NUFLARE TECHNOLOGY INC1 citations47
US9811896B2Nov 7, 2017
Measuring apparatus
NUFLARE TECHNOLOGY INC0 citations42
US9659361B2May 23, 2017
Measuring apparatus that generates positional deviation distribution of a pattern on a target object
NUFLARE TECHNOLOGY INC0 citations42
US9626755B2Apr 18, 2017
Mask inspection apparatus and mask inspection method
NUFLARE TECHNOLOGY INC0 citations42
TOSHIBA KK
9 patentsUS6285783B1Sep 4, 2001
Pattern data generating apparatus and method for inspecting defects in fine patterns in a photomask or semiconductor wafer
TOSHIBA KK74 citations96
US7526119B2Apr 28, 2009
Pattern inspection apparatus
TOSHIBA KK21 citations92
US7590277B2Sep 15, 2009
Pattern inspecting method
TOSHIBA KK15 citations84
US7421109B2Sep 2, 2008
Pattern inspection apparatus
TOSHIBA KK13 citations84
US7551767B2Jun 23, 2009
Pattern inspection apparatus
TOSHIBA KK5 citations74
US7522276B2Apr 21, 2009
Pattern inspection method
TOSHIBA KK2 citations63
US7415149B2Aug 19, 2008
Pattern inspection apparatus
TOSHIBA KK3 citations63
US7372560B2May 13, 2008
Pattern inspection apparatus
TOSHIBA KK3 citations63
US7359546B2Apr 15, 2008
Defect inspection apparatus and defect inspection method
TOSHIBA KK4 citations63
ADVANCED MASK INSPECTION TECH
3 patentsUS7664308B2Feb 16, 2010
Photomask inspection apparatus comparing optical proximity correction patterns to minimum and maximum limits
ADVANCED MASK INSPECTION TECH9 citations84
US7639863B2Dec 29, 2009
Die-to-database photomask defect detection using region data to modify inspection thresholds
ADVANCED MASK INSPECTION TECH10 citations84
US7630535B2Dec 8, 2009
Die-to-die photomask defect detection using region data to modify inspection thresholds
ADVANCED MASK INSPECTION TECH13 citations84