Inventor
FUKUI TATSUO
JP21 patents
⚠️ This page may combine multiple inventors who share the name “FUKUI TATSUO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NIKON CORP
11 patentsUS6668075B1Dec 23, 2003
Position detection apparatus and method
NIKON CORP42 citations92
US7528954B2May 5, 2009
Method of adjusting optical imaging system, positional deviation detecting mark, method of detecting positional deviation, method of detecting position, position detecting device and mark identifying device
NIKON CORP8 citations83
US6975399B2Dec 13, 2005
mark position detecting apparatus
NIKON CORP17 citations83
US6885450B2Apr 26, 2005
Apparatus for detecting optical positional deviation
NIKON CORP17 citations83
US7456967B2Nov 25, 2008
Mark position detection apparatus
NIKON CORP7 citations74
US7197176B2Mar 27, 2007
Mark position detecting apparatus and mark position detecting method
NIKON CORP8 citations72
US10725278B2Jul 28, 2020
Microscope, observation method, and storage medium
NIKON CORP1 citations62
US7580121B2Aug 25, 2009
Focal point detection apparatus
NIKON CORP3 citations62
US11906431B2Feb 20, 2024
Microscope apparatus
NIKON CORP0 citations51
US8994957B2Mar 31, 2015
Detection method and detection apparatus
NIKON CORP0 citations51
US8867019B2Oct 21, 2014
Projection optical system, exposure apparatus, exposure method, display manufacturing method, mask, and mask manufacturing method
NIKON CORP0 citations51
SONY CORP
6 patentsUS6760146B2Jul 6, 2004
Light modulation element, GLV device, and laser display
SONY CORP61 citations96
US6240111B1May 29, 2001
Laser beam generating apparatus and method
SONY CORP18 citations92
US5526169AJun 11, 1996
Electro-optical modulator
SONY CORP8 citations74
US6146251ANov 14, 2000
Polishing method, method of manufacturing an optical device, and a liquid suspension used for polishing
SONY CORP9 citations73
US5370076ADec 6, 1994
Method of producing single crystal of KTiOPO4
SONY CORP11 citations72
US7212559B2May 1, 2007
Optical resonator and laser oscillator
SONY CORP0 citations52