P

Inventor

TSOU LEN YUAN

US8 patents
⚠️ This page may combine multiple inventors who share the name “TSOU LEN YUAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

PHILIPS CORP

3 patents
US5146426ASep 8, 1992

Electrically erasable and programmable read only memory with trench structure

PHILIPS CORP114 citations95
US5007982AApr 16, 1991

Reactive ion etching of silicon with hydrogen bromide

PHILIPS CORP44 citations91
US5240875AAug 31, 1993

Selective oxidation of silicon trench sidewall

PHILIPS CORP13 citations72

PHILIPS ELECTRONICS NA

1 patent
US5606521AFeb 25, 1997

Electrically erasable and programmable read only memory with non-uniform dielectric thickness

PHILIPS ELECTRONICS NA84 citations95

IBM

1 patent
US6328041B1Dec 11, 2001

Universal cleaning wafer for a plasma chamber

IBM11 citations70

INFINEON TECHNOLOGIES AG

1 patent
US7759235B2Jul 20, 2010

Semiconductor device manufacturing methods

INFINEON TECHNOLOGIES AG5 citations62

ZHUANG HAOREN

1 patent
US8697339B2Apr 15, 2014

Semiconductor device manufacturing methods

ZHUANG HAOREN2 citations58

SAMSUNG ELECTRONICS CO LTD

1 patent
US7541290B2Jun 2, 2009

Methods of forming mask patterns on semiconductor wafers that compensate for nonuniform center-to-edge etch rates during photolithographic processing

SAMSUNG ELECTRONICS CO LTD1 citations48