Inventor
SATO ATSUHIKO
JP12 patents
⚠️ This page may combine multiple inventors who share the name “SATO ATSUHIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MERCK PATENT GMBH
5 patentsUS11401384B2Aug 2, 2022
Silicous film forming composition comprising block copolymer and method for producing siliceous film using same
MERCK PATENT GMBH2 citations72
US11760842B2Sep 19, 2023
Composition comprising block copolymer, and method for producing siliceous film using the same
MERCK PATENT GMBH0 citations62
US12091323B2Sep 17, 2024
Amorphous silicon forming composition comprising block copolymer and method for producing amorphous silicon film using same
MERCK PATENT GMBH0 citations59
US12060276B2Aug 13, 2024
Method for producing amorphous silicon sacrifice film and amorphous silicon forming composition
MERCK PATENT GMBH0 citations59
US12522714B2Jan 13, 2026
Polysiloxane composition
MERCK PATENT GMBH0 citations53