Inventor
AIUCHI TAKASHI
JP4 patents
⚠️ This page may combine multiple inventors who share the name “AIUCHI TAKASHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
3 patentsUS6974963B2Dec 13, 2005
Substrate inspecting device, coating/developing device and substrate inspecting method
TOKYO ELECTRON LTD7 citations69
US6394670B2May 28, 2002
Parts maintenance managing system
TOKYO ELECTRON LTD4 citations60
US6766209B2Jul 20, 2004
Managing system, managing method, host computer, and information collecting/transmitting unit
TOKYO ELECTRON LTD5 citations58