Inventor
SPULLER MATTHEW
US12 patents
⚠️ This page may combine multiple inventors who share the name “SPULLER MATTHEW”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
11 patentsUS11348769B2May 31, 2022
Plasma-enhanced anneal chamber for wafer outgassing
APPLIED MATERIALS INC5 citations71
US10770272B2Sep 8, 2020
Plasma-enhanced anneal chamber for wafer outgassing
APPLIED MATERIALS INC5 citations71
US12347679B2Jul 1, 2025
System and method for radical and thermal processing of substrates
APPLIED MATERIALS INC0 citations61
US12327763B2Jun 10, 2025
Treatment methods for titanium nitride films
APPLIED MATERIALS INC0 citations61
US11823901B2Nov 21, 2023
System and method for radical and thermal processing of substrates
APPLIED MATERIALS INC0 citations61
US11817297B2Nov 14, 2023
System and method for managing substrate outgassing
APPLIED MATERIALS INC1 citations61
US7776516B2Aug 17, 2010
Graded ARC for high NA and immersion lithography
APPLIED MATERIALS INC4 citations61
US11587789B2Feb 21, 2023
System and method for radical and thermal processing of substrates
APPLIED MATERIALS INC0 citations60
US11978646B2May 7, 2024
Thermal chamber with improved thermal uniformity
APPLIED MATERIALS INC0 citations57
US12540384B2Feb 3, 2026
Plasma processing with tunable nitridation
APPLIED MATERIALS INC0 citations51
US7851385B2Dec 14, 2010
Low temperature conformal oxide formation and applications
APPLIED MATERIALS INC0 citations46