Inventor

TANG SUM-YEE BETTY

US5 patents

⚠️ This page may combine multiple inventors who share the name “TANG SUM-YEE BETTY”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

3 patents

US6380096B2Apr 30, 2002

In-situ integrated oxide etch process particularly useful for copper dual damascene

APPLIED MATERIALS INC96 citations96

US7407893B2Aug 5, 2008

Liquid precursors for the CVD deposition of amorphous carbon films

APPLIED MATERIALS INC33 citations90

US7776516B2Aug 17, 2010

Graded ARC for high NA and immersion lithography

APPLIED MATERIALS INC4 citations61

(unassigned)

1 patent

US6762127B2Jul 13, 2004

Etch process for dielectric materials comprising oxidized organo silane materials

320 citations94

YEH WENDY H

1 patent

US8125034B2Feb 28, 2012

Graded ARC for high NA and immersion lithography

YEH WENDY H0 citations44