Inventor

KOMURA TOMOMI

JP4 patents

⚠️ This page may combine multiple inventors who share the name “KOMURA TOMOMI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MEMC ELECTRONIC MATERIALS

2 patents

US7930058B2Apr 19, 2011

Nanotopography control and optimization using feedback from warp data

MEMC ELECTRONIC MATERIALS28 citations90

US7601049B2Oct 13, 2009

Double side wafer grinder and methods for assessing workpiece nanotopology

MEMC ELECTRONIC MATERIALS15 citations82

BHAGAVAT SUMEET S

2 patents

US8712575B2Apr 29, 2014

Hydrostatic pad pressure modulation in a simultaneous double side wafer grinder

BHAGAVAT SUMEET S8 citations80

US8145342B2Mar 27, 2012

Methods and systems for adjusting operation of a wafer grinder using feedback from warp data

BHAGAVAT SUMEET S8 citations77